DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: Magnetic Sputtering
FIC: Peter Bermel
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom Bay S
Max Wafer Size: 4
Metal/dielectric sputtering system
DC/RF sputtering system, Base pressure of 5x10-6torr, reactive sputering capable, Materials include: Si, Ge, Ag, Cu, Al, Ti, Ta, W, Au, Nb, Wsi4, TiO2, Si3N4, SiO2
Ta, Ru, MgO, Cu, W, NiFe, PY, CoFeB
* Must install Coral and be a trained user to reserve a slot on this system.