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PVD Sputterer #2

Equipment home > Deposition > PVD Sputterer #2

General Information:

Coral Name: Magnetic Sputtering
FIC: Peter Bermel
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom Bay S
Max Wafer Size: 4

System Information:

General Description:

Metal/dielectric sputtering system


DC/RF sputtering system, Base pressure of 5x10-6torr, reactive sputering capable, Materials include: Si, Ge, Ag, Cu, Al, Ti, Ta, W, Au, Nb, Wsi4, TiO2, Si3N4, SiO2

Materials Compatibility:

Ta, Ru, MgO, Cu, W, NiFe, PY, CoFeB

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.