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Coral Name: pyrogenic_oxidation
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 3 inch (75 mm)
Thermal oxidation by pyrogenically combining O2 and H2.
~Process gases include Hydrogen, Oxygen, Nitrogen, and Argon.
~Able to achieve temperatures of 1100°C
Silicon substrates only
Due to cleanliness and contamination concerns, this furnace tube is limited use
* Must install Coral and be a trained user to reserve a slot on this system.