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Ultrapure Water System

Equipment home > Deposition > Ultrapure Water System

General Information:

Process/Equipment Owner: Tim Miller

System Information:

General Description:

A part of the specialized physical facilities within the Birck subfab, the UPW system is capable of cleaning water to nanograde purity levels for use in the fume hoods and specialty laboratory sinks around Birck.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.