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Equipment

Veeco Dimension AFM

Equipment home > Deposition > Veeco Dimension AFM

General Information:

Coral Name: nanoman_afm
FIC: Shared
Process/Equipment Owner: John Coy
Location: Cleanroom E Bay
Max Wafer Size: 6

System Information:

General Description:

Veeco Dimension 3100 AFM
--Nanomanipulation
--Nanolithography
--Conductive AFM module
-Used to investigate sample surfaces.

Capabilities:

Specifications:

X&Y Scan range: 90 µm square, lateral accuracy typically within 1%, max. 2%.
Z range: 5 µm
Electronic resolution: 16-bit on all axes for all scan sizes and offsets.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.