Coral Name: nanoman_afm
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom E Bay
Max Wafer Size: 6
Veeco Dimension 3100 AFM
--Conductive AFM module
-Used to investigate sample surfaces.
X&Y Scan range: 90 µm square, lateral accuracy typically within 1%, max. 2%.
Z range: 5 µm
Electronic resolution: 16-bit on all axes for all scan sizes and offsets.
* Must install Coral and be a trained user to reserve a slot on this system.