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OMVPE - Aixtron

Equipment home > Elemental Analysis > OMVPE - Aixtron

General Information:

Coral Name: aixtron
FIC: Chen Yang
Process/Equipment Owner: John Coy
Location: brk2221
Max Wafer Size: 4

System Information:

General Description:


Organometallic vapor phase epitaxy (OMVPE) for gallium nitride and gallium antiminde based materials
Low growth rates (~1m/hr)
Manufacturer: Aixtron Inc. (200/4HT horizontal reactor)

Capabilities:


Organometallic sources
aluminum (TMA) antimony (TMSb)
gallium(TMG)
indium (Solution TMI)
Hydride gas
ammonia
Carrier gases
nitrogen
hydrogen
Dopants
silicon (silane)
magnesium (Cp2Mg)
Max temp
1200°C

Materials Compatibility:

III-V compounds

Notes:

Training on this equipment is a long term commitment

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.