nanoHUB could be intermittently unavailable on 05/04 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/04 at 8:00 am (EST).
Coral Name: aixtron
FIC: Chen Yang
Process/Equipment Owner: John Coy
Max Wafer Size: 4
Organometallic vapor phase epitaxy (OMVPE) for gallium nitride and gallium antiminde based materials
Low growth rates (~1m/hr)
Manufacturer: Aixtron Inc. (200/4HT horizontal reactor)
aluminum (TMA) antimony (TMSb)
indium (Solution TMI)
Training on this equipment is a long term commitment
* Must install Coral and be a trained user to reserve a slot on this system.