Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.
Coral Name: branson
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom Bay K
Max Wafer Size: 6
This system is used to reactively clean substrates or strip photoresist using Ar/O2 plasma.
The Branson Asher is a plasma system which uses Ar and O2 gases for cleaning or etching purposes. The system consists of a process chamber, main unit, RF generator, pressure gauge, Faraday cage, and power supply.
* Must install Coral and be a trained user to reserve a slot on this system.