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Coral Name: branson
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom Bay K
Max Wafer Size: 6
This system is used to reactively clean substrates or strip photoresist using Ar/O2 plasma.
The Branson Asher is a plasma system which uses Ar and O2 gases for cleaning or etching purposes. The system consists of a process chamber, main unit, RF generator, pressure gauge, Faraday cage, and power supply.
* Must install Coral and be a trained user to reserve a slot on this system.