Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.


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Critical point dryer (CPD)

Equipment home > Etching > Critical point dryer (CPD)

General Information:

Coral Name: CPD
FIC: Dimitrios Peroulis
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom-Bay S
Max Wafer Size: 6

System Information:

General Description:

Wafer CPD MEMS Dryer


Ranges are from .25" to 6" wafer

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.