Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: CPD
FIC: Dimitrios Peroulis
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom-Bay S
Max Wafer Size: 6
Wafer CPD MEMS Dryer
Ranges are from .25" to 6" wafer
* Must install Coral and be a trained user to reserve a slot on this system.