DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).

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Equipment

Critical point dryer (CPD)

Equipment home > Etching > Critical point dryer (CPD)

General Information:

Coral Name: CPD
FIC: Dimitrios Peroulis
Process/Equipment Owner: John Coy
Location: Cleanroom-Bay S
Max Wafer Size: 6

System Information:

General Description:

Wafer CPD MEMS Dryer

Capabilities:

Ranges are from .25" to 6" wafer

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.