DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: CPD
FIC: Dimitrios Peroulis
Process/Equipment Owner: John Coy
Location: Cleanroom-Bay S
Max Wafer Size: 6
Wafer CPD MEMS Dryer
Ranges are from .25" to 6" wafer
* Must install Coral and be a trained user to reserve a slot on this system.