Coral Name: probe_1
Process/Equipment Owner: Nithin Raghunathan
Location: BRK 2261
Max Wafer Size: 4
Probe Station I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an Keithley SCS4200 Semiconductor Parameter Analyzer, an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.
* Must install Coral and be a trained user to reserve a slot on this system.