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Equipment

Probe Station I

Equipment home > Etching > Probe Station I

General Information:

Coral Name: probe_1
FIC: Shared
Process/Equipment Owner: Aamer Mahmood
Location: BRK 2261
Max Wafer Size: 4

System Information:

General Description:

Probe Station I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an Keithley SCS4200 Semiconductor Parameter Analyzer, an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.

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* Must install Coral and be a trained user to reserve a slot on this system.