Coral Name: MA24
FIC: David Janes
Process/Equipment Owner: Mike Courtney
Location: Cleanroom N Bay
Max Wafer Size: 4
The Karl Suss MA24 is a fully automatic production mask aligner designed for cassette-to-cassette operation. This tool is designed for the fabrication of whole 4" inch wafers only!
It is operated in contact mode on the bottom lamp only and proximity mode on the top lamp only. It can be used in single bottom exposure only or double top and bottom exposures simultaneously.
A manual mode is available in which wafers are loaded to the flat finder manually one at a time but all wafers must unload automatically to the unload cassette.
* Must install Coral and be a trained user to reserve a slot on this system.