Upcoming reboots during the week of October 24 will cause tool sessions to be lost. This notice will be updated with the day and time. Sorry for any inconvenience.
Coral Name: vecco_thermal_1
FIC: Minghao Qi
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay L
Max Wafer Size: 4
*Thermal evaporates materials with a 4 electrodes
*Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
*uses an Inficon deposition controller to monitor deposition thickness
Materials include: Ti, Ni, Fe, Co, Al, Cu
Ti, Ni, Fe, Al, Cu, PY
* Must install Coral and be a trained user to reserve a slot on this system.