Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.
Coral Name: vecco_thermal_1
FIC: Minghao Qi
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay L
Max Wafer Size: 4
*Thermal evaporates materials with a 4 electrodes
*Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
*uses an Inficon deposition controller to monitor deposition thickness
Materials include: Ti, Ni, Fe, Co, Al, Cu
Ti, Ni, Fe, Al, Cu, PY
* Must install Coral and be a trained user to reserve a slot on this system.