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Veeco Thermal Evaporator

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General Information:

Coral Name: vecco_thermal_1
FIC: Minghao Qi
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay L
Max Wafer Size: 4

System Information:

General Description:

*Thermal evaporates materials with a 4 electrodes

*Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers

*uses an Inficon deposition controller to monitor deposition thickness


Materials include: Ti, Ni, Fe, Co, Al, Cu

Materials Compatibility:

Ti, Ni, Fe, Al, Cu, PY

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.