DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: vecco_thermal_1
FIC: Minghao Qi
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay L
Max Wafer Size: 4
*Thermal evaporates materials with a 4 electrodes
*Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
*uses an Inficon deposition controller to monitor deposition thickness
Materials include: Ti, Ni, Fe, Co, Al, Cu
Ti, Ni, Fe, Al, Cu, PY
* Must install Coral and be a trained user to reserve a slot on this system.