DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: DI3100_brk1039
FIC: Ron Reifenberger
Process/Equipment Owner: Jerry Shepard
Location: BNC 1039
Max Wafer Size: 6
The Dimension 3100 provides high resolution, three dimensional images.
X&Y Scan range: 90 µm square, lateral accuracy typically within 1%, max. 2%.
Z range: 5 µm
Electronic resolution: 16-bit on all axes for all scan sizes and offsets.
* Must install Coral and be a trained user to reserve a slot on this system.