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Dimension 3100 Scanning Probe Microscope (Veeco)

Equipment home > Imaging > Dimension 3100 Scanning Probe Microscope (Veeco)

General Information:

Coral Name: DI3100_brk1039
FIC: Ron Reifenberger
Process/Equipment Owner: John Coy
Location: BNC 1039
Max Wafer Size: 6

System Information:

General Description:

The Dimension 3100 provides high resolution, three dimensional images.



X&Y Scan range: 90 µm square, lateral accuracy typically within 1%, max. 2%.
Z range: 5 µm
Electronic resolution: 16-bit on all axes for all scan sizes and offsets.

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* Must install Coral and be a trained user to reserve a slot on this system.