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FEI Nova 200 NanoLab DualBeamTM-SEM/FIB

Equipment home > Imaging > FEI Nova 200 NanoLab DualBeamTM-SEM/FIB

General Information:

Coral Name: nova_200
FIC: Volkan Ortalan
Process/Equipment Owner: birckemc@purdue.edu
Location: BRK 1237
Max Wafer Size: 6

System Information:

General Description:

Combines ultra-high resolution field emission scanning electron microscopy (SEM) and precise focused ion beam (FIB) etch and Pt deposition.
Comprehensive beam chemistries for Pt deposition and etch, and automation enable creation of structures such as:
• Site Specific TEM sample preperation
• Nanotube-based nano-structure assembly;
• Nano-bridge creation;
• Photonic array prototyping;
• Laser prototyping;
• Nano-stamping;
• AFM tip modification;
• MEMS modification,
Equipped with Klocke Nanorobotics Manipulator

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.