Coral Name: nova_200
FIC: Volkan Ortalan
Process/Equipment Owner: Rosa Diaz
Location: BRK 1237
Max Wafer Size: 6
Combines ultra-high resolution field emission scanning electron microscopy (SEM) and precise focused ion beam (FIB) etch and Pt deposition.
Comprehensive beam chemistries for Pt deposition and etch, and automation enable creation of structures such as:
• Site Specific TEM sample preperation
• Nanotube-based nano-structure assembly;
• Nano-bridge creation;
• Photonic array prototyping;
• Laser prototyping;
• AFM tip modification;
• MEMS modification,
Equipped with Klocke Nanorobotics Manipulator
* Must install Coral and be a trained user to reserve a slot on this system.