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Coral Name: MicroSample_R-T
FIC: Vladimir Shalaev
Process/Equipment Owner: Alexei Lagoutchev
Max Wafer Size: N/A
Flexible table-top visible range spectrophotometer with Acton monochromator and LN2 cooled CCD.
Reflection and transmission spectroscopy of small-area (~50um) specimens
* Must install Coral and be a trained user to reserve a slot on this system.