Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: MicroSample_R-T
FIC: Vladimir Shalaev
Process/Equipment Owner: Alexei Lagoutchev
Max Wafer Size: N/A
Flexible table-top visible range spectrophotometer with Acton monochromator and LN2 cooled CCD.
Reflection and transmission spectroscopy of small-area (~50um) specimens
* Must install Coral and be a trained user to reserve a slot on this system.