DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
FIC: Tim Sands
Process/Equipment Owner: Bivas Saha
Location: BRK 1217
Hot plate bonder for applying temperature, pressure, and inert gas ambient during bonding processes
4” diameter wafer maximum
2 independently controlled hot plates
Enclosure for inert gas ambient
Water cooling for quick cycling of samples
2” adapter available for improving pressure uniformity
* Must install Coral and be a trained user to reserve a slot on this system.