Coral Name: Joel_jcm-5000
Process/Equipment Owner: Bill Rowe
Max Wafer Size: 4
The JCM-5000 is an easy to use tabletop SEM. It is ideal for quick process checks.
The system can operate at 5kV, 10kV or 15kV. It has a high and low vacuum mode. It is capable for viewing substrates up to 40,000 magnification.
* Must install Coral and be a trained user to reserve a slot on this system.