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Jeol Table Top SEM

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General Information:

Coral Name: Joel_jcm-5000
Process/Equipment Owner: Bill Rowe
Location: Cleanroom
Max Wafer Size: 4

System Information:

General Description:

The JCM-5000 is an easy to use tabletop SEM. It is ideal for quick process checks.


The system can operate at 5kV, 10kV or 15kV. It has a high and low vacuum mode. It is capable for viewing substrates up to 40,000 magnification.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.