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Equipment

Jipelec

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General Information:

Coral Name: JipelecRTA
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 8 inch (200 mm)

System Information:

General Description:

The Jipelec RTA is a very powerful rapid thermal processing machine. The stainless steel cold wall chamber provides a very clean process environment. Small samples are placed on a 6" wafer holder. Temperature control depends upon your final steady state temperature. For temperature below 500°C, a thermocouple is used to control the temperature. For temperatures above 500C, and pyrometer is used.

Capabilities:

~Capable of handling small chip samples as well as whole wafers up to 8 inch
~Temperature ramping rates can be as high as 300°C per second, although not recommended for process reproducibility
~Process gases include N2, O2, Ar, and Forming Gas
~Vacuum annealing capability down to 50 mTorr
~1000°C maximum steady state temperature
~5 minute maximum steady state time

Materials Compatibility:

Compatibility by chamber

Notes:

Note: You must supply (and piranha clean) your own 6" silicon wafer as a sample holder for smaller samples

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.