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Minipulse RTA

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General Information:

Coral Name: rtp_minipulse
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 6 inch (150 mm)

System Information:

General Description:

The Minipulse RTA is a small, benchtop rapid thermal processing machine used for a wide range of experiments, thus, contamination and cleanliness is not controlled.


~Capable of simple time at elevated temperature experiments for short time intervals
~Steady state process time can be set from 1 second to a maximum of 5 minutes
~Steady state temperature can be set from 300 to 1000°C
~Process gas is limited to N2


Please note: Not capable of long process runs at high temperatures

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* Must install Coral and be a trained user to reserve a slot on this system.