Coral Name: rtp_minipulse
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 6 inch (150 mm)
The Minipulse RTA is a small, benchtop rapid thermal processing machine used for a wide range of experiments, thus, contamination and cleanliness is not controlled.
~Capable of simple time at elevated temperature experiments for short time intervals
~Steady state process time can be set from 1 second to a maximum of 5 minutes
~Steady state temperature can be set from 300 to 1000°C
~Process gas is limited to N2
Please note: Not capable of long process runs at high temperatures
* Must install Coral and be a trained user to reserve a slot on this system.