Coral Name: N/A
FIC: Arvind Raman
Process/Equipment Owner: John Coy
Location: BRK 1089A
Max Wafer Size: 6
General purpose AFM with an open loop scanner, xy range of 30-40 µm, z range of 5-7 µm. This system has a Nanoscope IIIA controller and version 4 of the software. Please contact John Coy for training.
* Must install Coral and be a trained user to reserve a slot on this system.