General Information:

Coral Name: N/A
FIC: Arvind Raman
Process/Equipment Owner: Jerry Shepard
Location: BRK 1089A
Max Wafer Size: 6

System Information:

General Description:

General purpose AFM with an open loop scanner, xy range of 30-40 µm, z range of 5-7 µm.  This system has a Nanoscope IIIA controller and version 4 of the software. Please contact John Coy for training.

Useful Links:

• Equipment Use Fees
• Reserve System

* Must install Coral and be a trained user to reserve a slot on this system.