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Cleanroom Ellipsometer

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General Information:

Coral Name: ellipsometer
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 6 inch (150 mm)

System Information:

General Description:

The cleanroom Ellipsometer can measure the thickness and refractive index of thin films on reflective substrates, as well as the opitcal properties of bare substrates.


~The stage can handle up to a 6 inch wafer diameter
~The ellipsometer utilizes a single laser at a wavelength of 6328Å
~Film Thickness Range: 0-60,000 Angstroms
~Spot size is approximately 1mm by 3mm
~Your substrate must be polished and must not rough to defract the laser


Note: Please know the optical constants (refractive index and extinction coefficient) of both your film to be measure, and the substrate you are measuring upon.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.