Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.

Support

Support Options

Submit a Support Ticket

Close

Equipment

Cleanroom Ellipsometer

Equipment home > Other > Cleanroom Ellipsometer

General Information:

Coral Name: ellipsometer
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 6 inch (150 mm)

System Information:

General Description:

The cleanroom Ellipsometer can measure the thickness and refractive index of thin films on reflective substrates, as well as the opitcal properties of bare substrates.

Capabilities:

~The stage can handle up to a 6 inch wafer diameter
~The ellipsometer utilizes a single laser at a wavelength of 6328Å
~Film Thickness Range: 0-60,000 Angstroms
~Spot size is approximately 1mm by 3mm
~Your substrate must be polished and must not rough to defract the laser

Notes:

Note: Please know the optical constants (refractive index and extinction coefficient) of both your film to be measure, and the substrate you are measuring upon.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.