Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.
Coral Name: ellipsometer
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 6 inch (150 mm)
The cleanroom Ellipsometer can measure the thickness and refractive index of thin films on reflective substrates, as well as the opitcal properties of bare substrates.
~The stage can handle up to a 6 inch wafer diameter
~The ellipsometer utilizes a single laser at a wavelength of 6328Å
~Film Thickness Range: 0-60,000 Angstroms
~Spot size is approximately 1mm by 3mm
~Your substrate must be polished and must not rough to defract the laser
Note: Please know the optical constants (refractive index and extinction coefficient) of both your film to be measure, and the substrate you are measuring upon.
* Must install Coral and be a trained user to reserve a slot on this system.