Coral Name: filmetrics
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom Bay S
Max Wafer Size: 8
The Filmetrics is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin film such as oxides, nitrides, resists, polyimides, polysilicon. The Filmetrics measures film characteristics by reflecting light and then analyzing this light over a range of wavelengths.
Measured films should be optically smooth. Very rough films and opaque films can not be measured.
Thickness Measurement Range:
nm to micron range
Optical Constant Measurement Range:
1000A and 10um
+/- 1nm at 500nm
400nm to 1000nm
* Must install Coral and be a trained user to reserve a slot on this system.