Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.
Coral Name: filmetrics
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom Bay S
Max Wafer Size: 8
The Filmetrics is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin film such as oxides, nitrides, resists, polyimides, polysilicon. The Filmetrics measures film characteristics by reflecting light and then analyzing this light over a range of wavelengths.
Measured films should be optically smooth. Very rough films and opaque films can not be measured.
Thickness Measurement Range:
nm to micron range
Optical Constant Measurement Range:
1000A and 10um
+/- 1nm at 500nm
400nm to 1000nm
* Must install Coral and be a trained user to reserve a slot on this system.