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Alpha-Step IQ

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General Information:

Coral Name: alphastep_2
FIC: Shared
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom Bay L
Max Wafer Size: 8

System Information:

General Description:

The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.

Capabilities:

Accommodates up to 150mm (6") substrate and 21mm (0.83") thick.

Measurement of vertical features ranging from 100A to approximately 2mm.

The horizontal resolution limited by the stylus radius.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.