DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: alphastep_2
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom Bay L
Max Wafer Size: 8
The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.
Accommodates up to 150mm (6") substrate and 21mm (0.83") thick.
Measurement of vertical features ranging from 100A to approximately 2mm.
The horizontal resolution limited by the stylus radius.
* Must install Coral and be a trained user to reserve a slot on this system.