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Titan 80-300 kV Environmental Transmission Electron Microscope

Equipment home > Other > Titan 80-300 kV Environmental Transmission Electron Microscope

General Information:

Coral Name: titan_80_300
FIC: Volkan Ortalan
Process/Equipment Owner: Rosa Diaz
Location: BRK 1269
Max Wafer Size: pieces only

System Information:

General Description:

High-resolution imaging with 1 Ångström information limit
Environmental Cell allows up to 20 Torr of gas pressure during in-situ observation at elevated temperatures
High-resolution STEM imaging with High-Angle Annular Dark-Field (HAADF) detector
3-D imaging through tomography
Chemical analysis & filtered imaging though Electron Energy Loss Spectroscopy (EELS)

Notes:

Superusers: Chang Wan Han; SungHwan Hwang; Jiayi Shao

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.