On Monday July 6th, the nanoHUB will be intermittently unavailable due to scheduled maintenance. We apologize for any inconvenience this may cause. close
Coral Name: xef2
Process/Equipment Owner: John Coy
Location: Cleanroom S Bay
Max Wafer Size: 4
~Xactix Xenon Difluroide E1 etch system for MEMS applications
~Etch rates dependent on amount of exposed silicon
~Any silicon based sample up to 4 inches.
~Isotropic etch for silicon
* Must install Coral and be a trained user to reserve a slot on this system.