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Xenon Difluoride Etch

Equipment home > Patterning > Xenon Difluoride Etch

General Information:

Coral Name: xef2
FIC: Shared
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom S Bay
Max Wafer Size: 4

System Information:

General Description:

~Xactix Xenon Difluroide E1 etch system for MEMS applications
~Etch rates dependent on amount of exposed silicon


~Any silicon based sample up to 4 inches.
~Isotropic etch for silicon

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.