Upcoming reboots during the week of October 24 will cause tool sessions to be lost. This notice will be updated with the day and time. Sorry for any inconvenience.
Coral Name: xef2
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom S Bay
Max Wafer Size: 4
~Xactix Xenon Difluroide E1 etch system for MEMS applications
~Etch rates dependent on amount of exposed silicon
~Any silicon based sample up to 4 inches.
~Isotropic etch for silicon
* Must install Coral and be a trained user to reserve a slot on this system.