Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: none
FIC: David Janes
Process/Equipment Owner: Mike Courtney
Location: Clanroom Bay M Cleanroom Bay N
Max Wafer Size: 6
The G3 Wafer Spinner is a compact desktop spin coater designed for low production spin coating applications and experimentation. The G3 Spin coater provides the ability to hold the product wafer with a vacuum chuck and spin that chuck at precise speeds and for controlled periods of time.
The G3 Spin coater has a vast array of chucks. Chuck sizes will accommodate sample sizes less than 1 centimeter and as large as whole 6 inch wafers.
* Must install Coral and be a trained user to reserve a slot on this system.