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Equipment

Electromask System

Equipment home > Patterning > Electromask System

General Information:

FIC: David Janes
Process/Equipment Owner: Mike Courtney
Location: Cleanroom M Bay

System Information:

General Description:

The Platemaker is a combination Step-and-Repeat camera and Pattern Generator capable of exposing either chrome or iron oxide photomasks up to 8" by 10" in size.
Jobs are to be submitted through our online Queue

Capabilities:

Direct Write
Light and Dark field masks with features 3 microns or larger, total design 0.25" smaller than glass size.
Step and Repeat
Light and Dark field masks with feature 1.5 microns and larger AND total die size less than 19,500x19,500 microns.
Transparencies
Convert transparencies to glass mask. Please contact staff for details and specifications.

Notes:

Our goal is to deliver your plates within 5 working days of job approval date (not submission date).
Jobs needed in less than two days are available only if time is permitting.
Five day delivery does not apply to staff vacations or university holidays. Please plan accordingly.
Data must meet the design requirements listed in: RULES
Please Do NOT send us email when a new job has been submitted. We receive notification from the queue.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.