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Equipment

Hitachi S-4800 Field Emission SEM

Equipment home > Patterning > Hitachi S-4800 Field Emission SEM

General Information:

Coral Name: s-4800
FIC: Volkan Ortalan
Process/Equipment Owner: Rosa Diaz
Location: BRK 1235
Max Wafer Size: 4

System Information:

General Description:

The S-4800 Cold Field Emission SEM combines the outstanding high resolution performance capabilities to offer superb resolution of ~ 2.0 nm at 30 kV.

Capabilities:

Accelerating voltages are from 500 V to 30 kV

Resolution ~ 2.0 nm at 30 kV

A choice of specimen stage: 4", 2" and 1" wafer and cross section

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.