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Equipment
Hitachi S-4800 Field Emission SEM
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General Information:
Coral Name: s-4800
FIC: Volkan Ortalan
Process/Equipment Owner: Rosa Diaz
Location: BRK 1235
Max Wafer Size: 4
System Information:
General Description:
The S-4800 Cold Field Emission SEM combines the outstanding high resolution performance capabilities to offer superb resolution of ~ 2.0 nm at 30 kV.
Capabilities:
Accelerating voltages are from 500 V to 30 kV
Resolution ~ 2.0 nm at 30 kV
A choice of specimen stage: 4", 2" and 1" wafer and cross section
Useful Links:
* Must install Coral and be a trained user to reserve a slot on this system.
