General Information:

Coral Name: NANONEX_NX-2000
FIC: Minghao Qi and Alexandra Boltasseva
Process/Equipment Owner: Bill Rowe
Location: Cleanroom N-Bay
Max Wafer Size: 8

System Information:

General Description:

The Nanonex is a nano-imprint lithography tool for making multiple copies of small geometry patterns.

Capabilities:

Molds and substrates from piece size up to 100mm
Pressures up to 550psi
Temperatures up to 250°C
Capable of resolutions <10nm
Capable of Thermal Imprinting
Capable of UV Imprinting
The NX-2000 can do both Thermal imprinting and Photo-curable imprinting
Can handle up to an 8 inch wafer
Will do patterning of less than 10nm
Quick cycle times-usually less than 2 minutes

Useful Links:

• Equipment Use Fees
• Reserve System

* Must install Coral and be a trained user to reserve a slot on this system.