Upcoming reboots during the week of October 24 will cause tool sessions to be lost. This notice will be updated with the day and time. Sorry for any inconvenience.
Coral Name: ma_6
FIC: David Janes
Process/Equipment Owner: Mike Courtney
Location: Cleanroom N Bay
Max Wafer Size: 6
The Suss MA 6 Aligner is designed for high resolution photolithography in a clean room environment. It offers unsurpassed flexibility in the handling of substrates of differing thickness, as well as standard 4 inch size wafers.
With the Suss MA 6 operated manually, all contact exposure programs (vacuum, hard, soft,contact and proximity) are provided to print features far into the submicron range. X and Y shift are below 0.1 micron and not detectable by optical means. Wafers up to 6 mm thickness may be processed.
* Must install Coral and be a trained user to reserve a slot on this system.