DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: ma_6
FIC: David Janes
Process/Equipment Owner: Mike Courtney
Location: Cleanroom N Bay
Max Wafer Size: 6
The Suss MA 6 Aligner is designed for high resolution photolithography in a clean room environment. It offers unsurpassed flexibility in the handling of substrates of differing thickness, as well as standard 4 inch size wafers.
With the Suss MA 6 operated manually, all contact exposure programs (vacuum, hard, soft,contact and proximity) are provided to print features far into the submicron range. X and Y shift are below 0.1 micron and not detectable by optical means. Wafers up to 6 mm thickness may be processed.
* Must install Coral and be a trained user to reserve a slot on this system.