Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: MJB3-1 and MJB3-2
FIC: David Janes
Process/Equipment Owner: Mike Courtney
Location: Cleanroom N Bay
Max Wafer Size: 3
The Suss MJB 3 Mask Aligner is designed for high resolution photolithography in a cleanroom environment. The MJB3 offers unsurpassed flexibility in the handling of irregularly shaped substrates and pieces of differing thicknesses, as well as standard size wafers up to 3 inches in diameter.
MJB3 Standard or soft contact Line/space resolutions of 1.5 microns and alignment accuracies of 0.2 microns can be obtained under optimum conditions.
MJB3 HP or High Precision Exposures in vacuum contact. Resolutions of 0.8 microns and alignment accuracies of 0.1 micron under optimum conditions
* Must install Coral and be a trained user to reserve a slot on this system.