Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: blue_m
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 2 inch (50 mm)
A table-top general purpose oven for inert and forming gas ambient conditions. Ramps to 1100C.
~Four process gases, N2, Ar, O2, and Forming Gas.
~Capable of temperatures up to 1100°C (single temperature zone)
~Samples lay horizontally on a quartz plate boat.
~The quartz tube is 3" in diameter.
* Must install Coral and be a trained user to reserve a slot on this system.