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Blue M Oven

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General Information:

Coral Name: blue_m
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 2 inch (50 mm)

System Information:

General Description:

A table-top general purpose oven for inert and forming gas ambient conditions. Ramps to 1100C.


~Four process gases, N2, Ar, O2, and Forming Gas.
~Capable of temperatures up to 1100°C (single temperature zone)
~Samples lay horizontally on a quartz plate boat.
~The quartz tube is 3" in diameter.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.