nanoHUB could be intermittently unavailable on 05/04 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/04 at 8:00 am (EST).


Support Options

Submit a Support Ticket



Blue M Oven

Equipment home > Thermal > Blue M Oven

General Information:

Coral Name: blue_m
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 2 inch (50 mm)

System Information:

General Description:

A table-top general purpose oven for inert and forming gas ambient conditions. Ramps to 1100C.


~Four process gases, N2, Ar, O2, and Forming Gas.
~Capable of temperatures up to 1100°C (single temperature zone)
~Samples lay horizontally on a quartz plate boat.
~The quartz tube is 3" in diameter.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.