Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.


Support Options

Submit a Support Ticket



Blue M Oven

Equipment home > Thermal > Blue M Oven

General Information:

Coral Name: blue_m
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 2 inch (50 mm)

System Information:

General Description:

A table-top general purpose oven for inert and forming gas ambient conditions. Ramps to 1100C.


~Four process gases, N2, Ar, O2, and Forming Gas.
~Capable of temperatures up to 1100°C (single temperature zone)
~Samples lay horizontally on a quartz plate boat.
~The quartz tube is 3" in diameter.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.