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Coral Name: Heidelberg
Process/Equipment Owner: Bill Rowe
Max Wafer Size: 9
The Heidelberg DLW 66fs is a laser writer that can do direct write on wafers or write reticles.
The systen will have a 1um resolution lens, 375nm laser, autofocus, and backside alignment capability.
* Must install Coral and be a trained user to reserve a slot on this system.