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Equipment home > Thermal > Heidelberg

General Information:

Coral Name: Heidelberg
Process/Equipment Owner: Bill Rowe
Location: Cleanroom
Max Wafer Size: 9

System Information:

General Description:

The Heidelberg DLW 66fs is a laser writer that can do direct write on wafers or write reticles.


The systen will have a 1um resolution lens, 375nm laser, autofocus, and backside alignment capability.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.