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Lesker E-Beam Evaporator

Equipment home > Thermal > Lesker E-Beam Evaporator

General Information:

Coral Name: Lesker Evaporator
FIC: Shared
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay K
Max Wafer Size: 6

System Information:

General Description:

* Six Pocket E-Beam Evaporator
* Water-cooled, rotatable stage
* Used for Au, Ti, Ni, Cr, Pd, Al
* Quick pumpdown to 5x10-7 torr
* Handles up to 6" substrate


* High Purity metal evaporator - Materials are limited to Au, Cr, Ti, Ni, Al, Pd, Mo, Pt
* Deposition rates range from .2-10 Angstroms/sec
* System Pressures of 5x10-8torr
* Primarily used for deposition of device quality Gold

Materials Compatibility:

Ti, Au, Cr, Pt, Al, Ni, Mo, Pd

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.