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Equipment

Anneal

General Information:

Coral Name:
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 5 inch (125 mm)

System Information:

General Description:

This 3-zone furnace is capable of high-temperature annealing in a nitrogen environment. Temperatures can go to 1100 C max.

Capabilities:

~A small, 3-zone furnace used for annealing samples and wafers up to 5" (125 mm)
~No ammonia capability at this time due to safety hazards
~Only capable of nitrogen processing at this time
~1100°C maximum temperature

Notes:

No ammonia capability at this time due to safety hazards

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.