Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 5 inch (125 mm)
This 3-zone furnace is capable of high-temperature annealing in a nitrogen environment. Temperatures can go to 1100 C max.
~A small, 3-zone furnace used for annealing samples and wafers up to 5" (125 mm)
~No ammonia capability at this time due to safety hazards
~Only capable of nitrogen processing at this time
~1100°C maximum temperature
No ammonia capability at this time due to safety hazards
* Must install Coral and be a trained user to reserve a slot on this system.