Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: NANONEX_NX-2000
FIC: Minghao Qi and Alexandra Boltasseva
Process/Equipment Owner: Bill Rowe
Location: Cleanroom N-Bay
Max Wafer Size: 8
The Nanonex is a nano-imprint lithography tool for making multiple copies of small geometry patterns.
Molds and substrates from piece size up to 100mm
Pressures up to 550psi
Temperatures up to 250°C
Capable of resolutions <10nm
Capable of Thermal Imprinting
Capable of UV Imprinting
The NX-2000 can do both Thermal imprinting and Photo-curable imprinting
Can handle up to an 8 inch wafer
Will do patterning of less than 10nm
Quick cycle times-usually less than 2 minutes
* Must install Coral and be a trained user to reserve a slot on this system.