DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: Tube_02_Nitride_Dep
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 6 inch (150 mm)
Horizontal furnaces for a variety of processes.
Tube 02 - LPCVD Nitride Deposition
Tube 03 - Low Temperature Oxide Deposition
Tube 06 - Polysilicon Deposition (not yet operational)
Tube 02 - 800°C maximum
Tube 03 - 400°C maximum
Tube 06 - 650°C maximum
All furnace tubes are capable of samples up to 6 inches in diameter.
Check with particular tube
* Must install Coral and be a trained user to reserve a slot on this system.