Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.


Support Options

Submit a Support Ticket



Protemp Horizontal Furnaces

Equipment home > Thermal > Protemp Horizontal Furnaces

General Information:

Coral Name: Tube_02_Nitride_Dep Tube_03_LTO_Dep Tube_06_Polysilicon
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 6 inch (150 mm)

System Information:

General Description:

Horizontal furnaces for a variety of processes.


Processes Capabilities:
Tube 02 - LPCVD Nitride Deposition
Tube 03 - Low Temperature Oxide Deposition
Tube 06 - Polysilicon Deposition (not yet operational)

Process Temperatures:

Tube 02 - 800°C maximum
Tube 03 - 400°C maximum
Tube 06 - 650°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Materials Compatibility:

Check with particular tube

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.