DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: PVD Products Evaporator
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay K
Six Pocket E-Beam Evaporator used for Ferro-magnetic materials
* High Purity metal evaporator - Materials are limited to Cu, Ti, Al, Fe, Ni, Co,Sc,Ta
* Base system pressure 2.0x10-8 torr
* Accomodates wafers up to 4" diameter
* Rotatable stage can be Water or LN2 cooled
* Atmosphere to deposition in 15 minutes
* Gridless Argon sputtering gun for O2 removal
* Capable of angled deposition at 30 or 45 degrees
Fe, PY, Ti, Cu, Al, Ni, Co, Sc
* Must install Coral and be a trained user to reserve a slot on this system.