Upcoming reboots during the week of October 24 will cause tool sessions to be lost. This notice will be updated with the day and time. Sorry for any inconvenience.


Support Options

Submit a Support Ticket



PVD E-Beam Evaporator

Equipment home > Thermal > PVD E-Beam Evaporator

General Information:

Coral Name: PVD Products Evaporator
FIC: Shared
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay K

System Information:

General Description:

Six Pocket E-Beam Evaporator used for Ferro-magnetic materials


* High Purity metal evaporator - Materials are limited to Cu, Ti, Al, Fe, Ni, Co,Sc,Ta
* Base system pressure 2.0x10-8 torr
* Accomodates wafers up to 4" diameter
* Rotatable stage can be Water or LN2 cooled
* Atmosphere to deposition in 15 minutes
* Gridless Argon sputtering gun for O2 removal
* Capable of angled deposition at 30 or 45 degrees

Materials Compatibility:

Fe, PY, Ti, Cu, Al, Ni, Co, Sc

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.