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Equipment

Raith e_LiNE

Equipment home > Thermal > Raith e_LiNE

General Information:

Coral Name: raith
FIC: Joerg Appenzeller
Process/Equipment Owner: Bill Rowe
Location: BRK 1239
Max Wafer Size: 4

System Information:

General Description:


The Raith e_LiNE is a 100eV to 30keV system
10MHz pattern processor
It is ideal for nanotech research in carbon nanotubes and nanowires
Uses a Schottky TFE filament

Capabilities:


It has a stage travel of 100mm x 100mm.
Can handle substrates up to 100mm x 100mm.
It can produce geometries less than 20nm in size.
Can write with a beam of less than 2nm
Can write with a current of 5pA-20nA

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.