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Varian E-beam Evaporator

Equipment home > Thermal > Varian E-beam Evaporator

General Information:

Coral Name: varian
FIC: Minghao Qi
Process/Equipment Owner: Kenny Schwartz
Location: Cleanroom-Bay K
Max Wafer Size: 4

System Information:

General Description:

~E-beam evaporates materials with a 4 pocket hearth

-Pockets hold 3.7 cc crucible liners

-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers

-uses an Inficon deposition controller to monitor deposition thickness


Materials: Au, Ti, Cr, Al, Ni, Cu, SiO2

Materials Compatibility:

Ge, Ni, Fe, Ag, NiFe, Au, Ti, Al2O3, ITO, SiO2, Cu, Al, Pd

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.