DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: varian
FIC: Minghao Qi
Process/Equipment Owner: Kenny Schwartz
Location: Cleanroom-Bay K
Max Wafer Size: 4
~E-beam evaporates materials with a 4 pocket hearth
-Pockets hold 3.7 cc crucible liners
-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
-uses an Inficon deposition controller to monitor deposition thickness
Materials: Au, Ti, Cr, Al, Ni, Cu, SiO2
Ge, Ni, Fe, Ag, NiFe, Au, Ti, Al2O3, ITO, SiO2, Cu, Al, Pd
* Must install Coral and be a trained user to reserve a slot on this system.