Upcoming reboots during the week of October 24 will cause tool sessions to be lost. This notice will be updated with the day and time. Sorry for any inconvenience.
Coral Name: varian
FIC: Minghao Qi
Process/Equipment Owner: Kenny Schwartz
Location: Cleanroom-Bay K
Max Wafer Size: 4
~E-beam evaporates materials with a 4 pocket hearth
-Pockets hold 3.7 cc crucible liners
-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
-uses an Inficon deposition controller to monitor deposition thickness
Materials: Au, Ti, Cr, Al, Ni, Cu, SiO2
Ge, Ni, Fe, Ag, NiFe, Au, Ti, Al2O3, ITO, SiO2, Cu, Al, Pd
* Must install Coral and be a trained user to reserve a slot on this system.