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  • Created 02 Apr 2013

Spring 2013: EE 226; 10:30-11:20AM

Instructor: M. A. Alam (alam at purdue dot edu)

Office Hours:
(or make an appointment for a different time by e-mail)

Course Announcements

Membership in this group is restricted to currently-enrolled ECE 695 students.








Course Description

This course will focus on the physics of reliability of small semiconductor devices. In traditional courses on device physics, the students learn how to compute current through a device when a voltage is applied. However, as transistors are turned on and off trillions of times during the years of the operation, gradual defects accumulate within the device so that at some point the transistor does not work anymore. The course will explore the physics and mathematics regarding how and when things break – a topic of great interest to semiconductor industry.

General References on MOSFETs and Bipolar Transistors
S. M. Sze, Physics of Semiconductor Devices, Wiley, New York. ISBN 0-471-05661-8
S. Tiwari, Compound Semiconductor Device Physics, Academic Press, 1991 (May be out of print, but the library will have a copy).

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Week 1: Introduction to Reliability Physics

ECE 695A Lecture 1: Reliability of Nanoelectronic Devices
Student Lecture Note 01 (545 KB)

ECE 695A Lecture 2: A Brief History of Reliability and Types of Reliability Models
Student Lecture Note 02 (617 KB)

ECE 695A Lecture 3: Reliability as a Threshold Problem
Student Lecture Note 03 (926 KB)

Matlab Code: Fish in a river with a waferfall

Homework Week 1:
Homework #1 (307 KB)
Homework #1 Code (5 KB)

Reading Assignment:

Week 1: References and Supplementary Information
Henry Petrosky often writes about how things break: An article about him (76 KB)
Reliability from material science point of view: Why things break by M. Eberhart. Harmony Books, 2003. ISBN 1-4000-4760-9
Reliability from System point of view: Fault-tolerant computing is a big area research: Prof. Bagchi’s website and some tools used for such computing Sharpe Software

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Week 2: Spatial Randomness and Nature of Defects

ECE 695A Lecture 4: Structures and Defects in Crystals
Student Lecture Note 04 (695 KB)

ECE 695A Lecture 5: Amorphous Material/Interfaces
Student Lecture Note 05 (1 MB)

ECE 695A Lecture 6: Defects in the Bulk and at Interfaces
Student Lecture Note 06 (518 KB)

Review Questions:
ECE 695A Lecture 5R: Review Questions

Homework Week 2:
Homework #2 (860 KB)
Homework #2 Code (4 MB)

Reading Assignment:
Week 2: References and Supplementary Information

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Week 3: Interface Reliability of Semiconductor Devices: NBTI Degradation

ECE 695A Lecture 7: Trapping in Pre-existing Traps
Student Lecture Note 07 (1023 KB)

ECE 695A Lecture 8: Phenomenological Observations for NBTI
Student Lecture Note 08 (756 KB)

ECE 695A Lecture 9: NBTI Time Dependence -- Stress Phase
Student Lecture Note 09 (1 MB)

Review Questions:
ECE 695A Lecture 7A: Appendix - Theory of Stochastic Distribution
ECE 695A Lecture 7R: Review Questions
ECE 695A Lecture 8R: Review Questions

Reading Assignment:

Week 3: References and Supplementary Information

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Week 4: Interface Reliability of Semiconductor Devices (Continued)

ECE 695A Lecture 10: NBTI Time Dependence -- Frequency and Duty Cycle Dependencies
Student Lecture Note 10 (942 KB)

ECE 695A Lecture 11: Temperature Dependence of NBTI
Student Lecture Note 11 (945 KB)

ECE 695A Lecture 12: Field Dependence of NBTI
Student Lecture Note 12 (3 MB)

Review Questions:
ECE 695A Lecture 10A: Appendix - Reflection on R-D Equation
ECE 695A Lecture 11R: Review Questions
ECE 695A Lecture 12R: Review Questions

Homework Week 4:
HW3.pdf (309 KB)

Reading Assignment:

Week 4: References and Supplementary Information
Reference Paper 1: NBTI: Classical Analysis (347 KB)
Reference Paper 2: NBTI: Recent Progress (578 KB)
Videotaped Lecture: On the Reliability of Micro-Electronic Devices: An Introductory Lecture on Negative Bias Temperature Instability

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Week 5: Interface Reliability of Semiconductor Devices: Hot Carrier Degradation

ECE 695A Lecture 13: Introductory Lecture on HCI Degradation
Student Lecture Note 13 (614 KB)

ECE 695A Lecture 14a: Voltage Dependent HCI I
ECE 695A Lecture 14b: Voltage Dependent HCI II
Student Lecture Note 14 (769 KB)

Review Questions:
ECE 695A Lecture 13R: Review Questions
ECE 695A Lecture 14R: Review Questions

Homework Week 5:
HW4.pdf (301 KB)
HW4code.txt (6 KB)

Reading Assignment:

Week 5: References and Supplementary Information
Reference Paper 1: (H2-D2 Isotope Effect)
Reference Paper 2: (Analytical Solution of Poisson Equation in 2D MOSFET)
Reference paper 3: (Analytical Solution to Drain Current in 2D MOSFET)

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Week 6: Hot Carrier Degradation and Theory and Practice of interface Characterization Techniques

ECE 695A Lecture 15: Off-state HCI Degradation
Student Lecture Note 15 (2 MB)

ECE 695A Lecture 16: Temperature Dependence of HCI
Student Lecture Note 16 (823 KB)

ECE 695A Lecture 17: Subthreshold and Idlin Methods
Student Lecture Note 17 (2 MB)

Review Questions:
ECE 695A Lecture 16: Review Questions
ECE 695A Lecture 17R: Review Questions

Homework Week 6:
HW5.pdf (642 KB)
HW5code.txt (273 KB)
HW6.pdf (410 KB)
HW6code.txt (23 KB)

Reading Assignment:

Week 6: References and Supplementary Information
Schroeder’s book is a very good overall reference. A few specific papers are:
Reference Paper 1: Charge Pumping (1 MB)
Reference Paper 2: DC-IV Method (680 KB)

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Week 7: Theory and Practice of interface Characterization Techniques

ECE 695A Lecture 18: DC-IV and Charge Pumping Methods
Student Lecture Note 18 (3 MB)

ECE 695A Lecture 19: Spin-Dependent Recombination and Electrically Detected Magnetic Resonance
Student Lecture Note 19 (733 KB)

ECE 695A Lecture 20: Will be recorded
Student Lecture Note 20 (2 MB)

ECE 695A Lecture 21: Introduction to Dielectric Breakdown
Student Lecture Note 21 (5 MB)

Review Questions:
ECE 695A Lecture 18R: Review Questions
ECE 695A Lecture 19R: Review Questions
ECE 695A Lecture 21R: Review Questions

Reading Assignment:

Week 7: References and Supplementary Information

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Mid Term Exam

2013midexam.pdf (349 KB)
2013midexamsol.pdf (439 KB)

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Week 8: Time-Dependent Dielectric Breakdown

ECE 695A Lecture 22: Voltage Dependence of Thin Dielectric Breakdown
Student Lecture Note 22 (4 MB)

ECE 695A Lecture 23: Characterization of Defects Responsible for TDDB
Student Lecture Note 23 (836 KB)

ECE 695A Lecture 24: Statistics of Oxide Breakdown - Cell percolation model
Student Lecture Note 24 (2 MB)

Review Questions:
ECE 695A Lecture 22R: Review Questions
ECE 695A Lecture 23R: Review Questions
ECE 695A Lecture 24R: Review Questions

Reading Assignment:

Week 8: References and Supplementary Information

Reference Paper 1: An Introductory Paper (Try to find the incorrectly labeled figure!) (631 KB)
Reference Tutorial: A More Technical Overview (2 MB)
A Review Article: A Broad Review by A. Ghetti (857 KB)

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Week 9: Time-Dependent Dielectric Breakdown

ECE 695A Lecture 25: Theory of Soft and Hard Breakdown
Student Lecture Note 25 (2 MB)

ECE 695A Lecture 26-1: Statistics of Soft Breakdown via Methods of Markov Chains
ECE 695A Lecture 26-2: Statistics of Soft Breakdown (Breakdown Position correlation)
Student Lecture Note 26 (3 MB)

Review Questions:
ECE 695A Lecture 25R: Review Questions
ECE 695A Lecture 26R: Review Questions

Homework Week 9:
HW7.pdf (1 MB)
HW7solution.pdf (82 KB)

Reading Assignment:

Week 9: References and Supplementary Information

Theory of Soft/Hard Breakdown: Paper1 (540 KB) and Paper2 (733 KB)
Theory of Multiple Soft Breakdown: (IRPS 2003 paper) An Interesting/Provocative Paper regarding the theory of “Existing Defects”: Why We Fall Apart! (1 MB)

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Week 10: Breakdown in Thick Dielectrics

ECE 695A Lecture 27: Correlated TDDB in Off-State HCI
Student Lecture Note 27 (3 MB)

ECE 695A Lecture 28: Circuit Implications of Dielectric Breakdown
Student Lecture Note 28 (729 KB)

ECE 695A Lecture 29: Circuit Implications of Dielectric Breakdown
Student Lecture Note 29 (2 MB)

Review Questions:
ECE 695A Lecture 27R: Review Questions
ECE 695A Lecture 29A: Appendix - Dimension of a Surface
ECE 695A Lecture 29R: Review Questions

Reading Assignment:

Week 10: References and Supplementary Information
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Week 11: Radiation Damage in Semiconductor Devices

ECE 695A Lecture 30: Breakdown in Dielectrics with Defects
Student Lecture Note 30 (1 MB)

ECE 695A Lecture 31: Collecting and Plotting Data
Student Lecture Note 31 (2 MB)

Review Questions:
ECE 695A Lecture 30R: Review Questions
ECE 695A Lecture 31R: Review Questions

Reading Assignment:

Week 11: References and Supplementary Information

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Week 12: Statistics of Reliability

ECE 695A Lecture 32: Physical vs. Empirical Distribution
Student Lecture Note 32 (775 KB)

ECE 695A Lecture 33: Model Selection/Goodness of Fit
Student Lecture Note 33 (243 KB)

ECE 695A Lecture 34: Scaling Theory of Design of Experiments
Student Lecture Note 34 (189 KB)

Review Questions:
ECE 695A Lecture 32R: Review Questions
ECE 695A Lecture 33R: Review Questions
ECE 695A Lecture 34A: Appendix - Variability by Bootstrap Method

Reading Assignment:

Week 12: References and Supplementary Information

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Week 13: Statistics of Reliability (continued)

ECE 695A Lecture 35: Design of Experiments
Student Lecture Note 35 (123 KB)

ECE 695A Lecture 37: Radiation Induced Damage – An overview(Actual Lecture 36)
Student Lecture Note 36 (1 MB)

Review Questions:
ECE 695A Lecture 35R: Review Questions
ECE 695A Lecture 37R: Review Questions(Actual Lecture 36)

Homework Week 13:
HW9.pdf (412 KB)
HW9solution.pdf (235 KB)
(file:HW10.pdf not found)

Reading Assignment:

Week 13: References and Supplementary Information

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Week 14: Radiation Damage in Semiconductor Devices and Concluding Lectures

ECE 695A Lecture 38: Charge Generation by Particles(Actual Lecture 37)
Student Lecture Note 37 (1 MB)

ECE 695A Lecture 39-1: Radiation and Devices I(Actual Lecture 38)
Student Lecture Note 38 (778 KB)

ECE 695A Lecture 39: Will be recorded
Student Lecture Note 39 (2 MB)

ECE 695A Lecture 40: Failure Analysis and Epilogue
Student Lecture Note 40 (85 KB)

Review Questions:
ECE 695A Lecture 38R: Review Questions(Actual Lecture 37)
ECE 695A Lecture 39-1R: Review Questions(Actual Lecture 38)

Reading Assignment:

Week 14: References and Supplementary Information

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Exams and Solutions

2013finalexam.pdf (353 KB)
2013finalexamsol.pdf (405 KB)


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