Table of Contents
Section I: Cleaning
- MOS Oxidation Clean
- Glassware Clean
- Solvent Clean
- General Purpose Oxidation Clean
- Post-Implantation Clean
- Ebeam Evaporation Sample Preparation
Section II: Film Deposition
- Polysilicon Deposition LPCVD
- TEOS SiO2 Deposition
- Atomic Layer Deposition SiO2
- Spin On Glass Deposition
- LTO Deposition
- Spin on Dopant Deposition
Section III: Lithography
- Liftoff PhotoLithography
- Etch Photolithography
- Image Reversal Photolithography
- De-Scum residual photoresist
Section IV: Film Removal
Chemical Etch
Reactive Ion Etch
- SiC Deep RIE Etch
- Polysilicon STS RIE Etch
- Polysilicon ICP RIE Etch With Metal Mask
- Polysilicon Etch With Oxide Mask
- SiC STS RIE Etch
- SiC ICP RIE Etch
- SiO2 Etch STS RIE
Section V: Thermal Processing
- GeneralPurposeThermalOxidation
- ThermalOxidationLindberg
- Polysilicon Diffusion Doping
- MOS Oxidation
- Implant Anneal
Section VI: Film Charectarization
- Optical Interfermetry
- Ellipsometry
- Raman Spectroscopy
- Goniometer
Section VII: Integrated Procedures
- Process Run Sheet for MOSFET SiC Mobility Devices
- Process Run Sheet for Thermal Oxidation Free Dielectrics for SiC Power Devices]
- Process Run Sheet for Ohmic Contact Anneal
Section VIII: Mechanical Processing
Appendix
Acknowledgments
Edited by Dallas Morisette
The SiC Cookbook benefited from the comments of a number of workers, including Weize Xie, Youlong Wang, Jayarama Shenoy, Michelle Mathur, Sei-Hyung Ryu, Mrinal Das, Jan Spitz, Man Pio Lam, Jian Tan, Kipp Schoen, Pauline Matin, Ivan Milos, Jason Henning, Dallas Morisette, Luo Yuan, Yu Li, Imran Khan, Chih-Fang Huang, Chao-Yang Lu, Ben Um, Rajesh Venugopal, Brian Johnson, Tze Yi Yeoh, Takashi Tsuji, Kwangchul Kim, and Jeong-Youb Lee, Rahul Ramamurthy, Naeem Islam, Monzurul Alam, Varun Garg
Wiki conversion: U.S. Army Research Laboratory, W911NF-15-2-0041, Program Manager: Aivars Lelis
Edition History
1st Edition, November, 1995
2nd Edition, November 23, 1996
3rd Edition, 1998
4th Edition, January 27, 2001
5th Edition, September 30, 2004
* 6th Edition, September 4, 2015 (1st wiki edition)