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Home Members Contributors Stephen D. Senturia


  • Organization
    Massachusetts Institute of Technology (MIT)

  • Employment Type
    University / College Faculty

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  • Address(es)
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  • Biography
    Stephen D. Senturia spent 35 years as Professor of Electrical Engineering at the Massachusetts Institute of Technology. He has been involved in micro-sensor and MEMS research since the early 1970’s, working on dielectric sensors, polymers in micro-electronics, methods of material property measurement, CAD tools for MEMS, and the Polychromator, a diffractive MEMS device. Since retiring from MIT in 2002, Dr. Senturia has served as Chairman and Chief Technology Officer of Polychromix, a company built on the Polychromator technology. Honor and professional societies include the National Academy of Engineering (Fellow), the IEEE (Fellow), Phi Beta Kappa, and Sigma Xi. In 2004, he was elected to a six-year term as President of the Transducer Research Foundation, a non-profit organization dedicated to the promotion and dissemination of research in micro-systems.

  • Interests
    Enter your Interests., a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.