A carbon nanotube interconnect compact model is developed with fundamental physics understanding and electrical modeling. Single Wall Carbon Nanotube (SWCNT) RC electrical model takes into the account the quantum resistance and capacitance, as well as electrostatic capacitance. A doped SWCNT interconnect model by introducing a doping enhancement factor Nc has also included in this model. SWCNT dimensions (L and D) and contact resistance Rc can be varied in our models.