Double-Clamped Silicon NEMS Resonators Model 1.0.0
This model is built for a silicon-based, double-clamped (source and drain), double-gate beam. The model takes into account capacitive modulation with the two gates, piezoresistive modulation through the beam and electrical parasitic elements.
Listed in Compact Models | publication by group NEEDS: New Era Electronic Devices and Systems
Additional materials available
Version 1.0.0 - published on 07 Mar 2016 doi:10.4231/D37659G7N - cite this
Licensed under NEEDS Modified CMC License according to these terms
Description
Micro/Nanoelectromechanical systems (M/NEMS) are gaining great momentum and interest in a variety of
applications, such as high-sensitivity mass sensing, tunable signal filtering and precision timing. They possess
inherently high quality factors and can provide narrow bandwidth operation. This model is built for a silicon-based, double-clamped (source and drain), double-gate (back and side gate) beam. The model takes into account capacitive modulation with the two gates, piezoresistive modulation through the beam and electrical parasitic elements.
Model Release Components ( Show bundle contents ) Bundle
Double-Clamped Silicon NEMS Resonators Model 1.0.0 Verilog-A(ZIP | 5 KB)- Double-Clamped Silicon NEMS Resonators Model 1.0.0 Benchmarks(ZIP | 2 KB)
Double-Clamped Silicon NEMS Resonators Model 1.0.0 Parameters(TXT | 1 KB)
Double-Clamped Silicon NEMS Resonators Model 1.0.0 Manual(PDF | 1007 KB)- License terms
Cite this work
Researchers should cite this work as follows:
- Shen, Y.; Calvert, S.; Rhoads, J. F.; Mohammadi, S. (2016). Double-Clamped Silicon NEMS Resonators Model. nanoHUB. doi:10.4231/D37659G7N
Notes
While this model is built for a double-gate silicon beam, currently, only behaviors associated with out-of-plane vibrations induced by a back gate excitation are valid. The side gate capacitance is set to be static in the model.
NEEDS: New Era Electronic Devices and Systems
This publication belongs to the NEEDS: New Era Electronic Devices and Systems group.