Double-Clamped Silicon NEMS Resonators Model 1.0.0

By Yanfei Shen1, Scott Calvert1, Jeffrey F. Rhoads1, Saeed Mohammadi1

Purdue University

This model is built for a silicon-based, double-clamped (source and drain), double-gate beam. The model takes into account capacitive modulation with the two gates, piezoresistive modulation through the beam and electrical parasitic elements.

Listed in Compact Models | publication by group NEEDS: New Era Electronic Devices and Systems

Additional materials available

Version 1.0.0 - published on 07 Mar 2016 doi:10.4231/D37659G7N - cite this

Licensed under NEEDS Modified CMC License according to these terms