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Process Modeling

By Dragica Vasileska

Arizona State University

Dragica Vasileska Contributions on the nanoHUB

Dragica Vasileska Contributions on the nanoHUB group image

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Abstract

This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.

Cite this work

Researchers should cite this work as follows:

  • Dragica Vasileska (2011), "Process Modeling," https://nanohub.org/resources/11909.

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In This Series

  1. Silvaco Athena - Part 1

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

  2. Silvaco Athena - Part 2

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

  3. Silvaco Athena - Part 3

    09 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.

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