XPS Thickness Solver

By Kyle Christopher Smith1, David A Saenz1, Dmitry Zemlyanov1, Andrey A Voevodin2

1. Purdue University 2. Air Force Research Laboratory

Helps the user to determine the thickness of an overlayer material from XPS experiment data.

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Version 3.11 - published on 15 Sep 2014

doi:10.4231/D3FJ29D7X cite this

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This tool was developed mainly to provide a quick analysis resource for XPS experiments involving graphene flakes or films of different thicknesses. Given sets of data from experimental results, it can provide the number of monolayers not only for graphene flakes, but other thin film materials.

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Network for Computational Nanotechnology (NCN), Birk Nanotechnology Center, Purdue University.


Kyle C. Smith, David Saenz, Dmitry Zemlyanov, Andrey A. Voevodin, Gerhard Klimeck

Sponsored by

Purdue Network for Computational Nanotechnology.


C. S. Fadley. Basic Concepts of X-Ray Photoelectron Spectroscopy, C. J. Powel and A. Jabolonsky. NIST Electron Inelastic Mean Free Path Database, CasaXPS.com


XPS Measurements of Graphene Film Thickness, submitted (2012).

Cite this work

Researchers should cite this work as follows:

  • RAPPTURE, NIST Database #71 and #82, CasaXPS.

  • Kyle Christopher Smith, David A Saenz, Dmitry Zemlyanov, Andrey A Voevodin (2014), "XPS Thickness Solver," https://nanohub.org/resources/xpsts. (DOI: 10.4231/D3FJ29D7X).

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