ME 517 Lecture 04: Microfabrication - Techniques I

By Steve Wereley

Mechanical Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Steve Wereley (2014), "ME 517 Lecture 04: Microfabrication - Techniques I," https://nanohub.org/resources/20285.

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2053 Mechanical Engineering, Purdue University, West Lafayette, IN

ME 517 Lecture 04: Microfabrication - Techniques I
  • Lecture 4: Microfabrication - Techniques I 1. Lecture 4: Microfabrication - … 0
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  • Outline of Microfabrication Section 2. Outline of Microfabrication Se… 20.75408742075409
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  • Supplementary References 3. Supplementary References 358.958958958959
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  • Outline of Introduction to Microfabrication and Lithography 4. Outline of Introduction to Mic… 386.18618618618621
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  • Basic Processes in Microfabrication 5. Basic Processes in Microfabric… 681.21454788121457
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  • Example of Voltage Divider Fabrication 6. Example of Voltage Divider Fab… 1145.0450450450451
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  • MEMS Materials 7. MEMS Materials 2095.1951951951951
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  • Crystalline Silicon 8. Crystalline Silicon 2186.8535201868535
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  • Crystallography 9. Crystallography 2490.29029029029
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  • Other Forms of Silicon 10. Other Forms of Silicon 2720.3536870203538
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  • Physical Properties of Silicon 11. Physical Properties of Silicon 2808.5752419085752
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  • Metal Films 12. Metal Films 2841.1411411411414
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  • Piezoresistivity 13. Piezoresistivity 2891.9586252919589
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