ME 517 Lecture 06: Microfabrication - Techniques III

By Steve Wereley

Mechanical Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Steve Wereley (2014), "ME 517 Lecture 06: Microfabrication - Techniques III," https://nanohub.org/resources/20385.

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2053 Mechanical Engineering, Purdue University, West Lafayette, IN

ME 517 Lecture 06: Microfabrication - Techniques III
  • Lecture 6: Microfabrication - Techniques III 1. Lecture 6: Microfabrication - … 0
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  • Lithography Resolution 2. Lithography Resolution 9.1424758091424767
    00:00/00:00
  • Lithography Resolution 3. Lithography Resolution 123.4567901234568
    00:00/00:00
  • Other Forms of lithography 4. Other Forms of lithography 592.19219219219224
    00:00/00:00
  • Electron Beam Lithography 5. Electron Beam Lithography 1551.0176843510178
    00:00/00:00
  • Outline of Additive and Subtractive Techniques 6. Outline of Additive and Subtra… 1670.6039372706041
    00:00/00:00
  • Dry Etch Techniques 7. Dry Etch Techniques 1779.5462128795464
    00:00/00:00
  • DC Plasmas 8. DC Plasmas 2536.87020353687
    00:00/00:00