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Mechanical Behavior of MEMS/NEMS

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Abstract

This lecture covers mechanical testing methods and behaviors of thin films and nanostructures. This lecture is related to the activities at the NSF Nanosystems Engineering Research Center (NERC) for Advanced Self-Powered Systems of Integrated Sensors and Technologies (ASSIST) at NC State University.

Bio

Yong Zhu is an Associate Professor in the Department of Mechanical and Aerospace Engineering at North Carolina State University. He received his B.S. degree in Mechanics and Mechanical Engineering from the University of Science and Technology of China, China (1999), and his M.S. (2001) and Ph.D. (2005) degrees in Mechanical Engineering from Northwestern University. After a postdoctoral fellow at the University of Texas at Austin, he joined North Carolina State University in 2007. Dr. Zhu's research interests lie at the interface between solid mechanics and micro/nano-technology, including mechanical properties and multiphysical coupling of nanomaterials, microelectromechanical systems (MEMS), wearable electronics and sensors, and interface mechanics of nanomaterials. He has received several awards including Best Poster Award in the Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior (2006), Sigma Xi Faculty Research Award (2012) and Society of Experimental Mechanics Young Investigator Award (2013).

Credits

NC State University Engineering Online, http://engineeringonline.ncsu.edu/

References

[1] Y. Zhu and H.D. Espinosa, "An electro-mechanical material testing system for in-situ electron microscopy and applications," Proceedings of the National Academy of Sciences USA 102, 14503-14508 (2005).
[2] Y. Zhu, C.H. Ke and H.D. Espinosa, "Experimental techniques for mechanical characterization of one-dimensional nanostructures," Experimental Mechanics 47, 7-24 (2007).
[3] K.J. Hemker and W.N. Sharpe, Jr., "Microscale Characterization of Mechanical Properties", Annual Review of Materials Science 37, 93-126 (2007).
[4] D.S. Gianola and C. Eberl, "Micro-and nanoscale tensile testing of materials", JOM 61, 24-35 (2009).

Cite this work

Researchers should cite this work as follows:

  • Yong Zhu (2014), "Mechanical Behavior of MEMS/NEMS," https://nanohub.org/resources/20420.

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