This seminar is an introduction to the MEMS technology as it applies to RF and Microwave systems. Besides discussing several key RF MEMS components (switches, varactors, inductors), reconfigurable circuit architectures will also be introduced. In addition, reliability and cost considerations as applied to the future of the RF MEMS technology will be included.

NCN@Purdue Student Leadership Team Network for Computational Nanotechnology The Institute for Nanoelectronics and Computing

Researchers should cite this work as follows:

• Dimitrios Peroulis (2007), "RF MEMS: Passive Components and Architectures," https://nanohub.org/resources/2141.

  BibTex | EndNote

1. circuits
2. devices
3. Nano Electro-Mechanical Systems (NEMS)
4. NEMS/MEMS